TRANSMISSION ELECTRON MICROSCOPE, AND PHOTOGRAPHING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transmission electron microscope allowing a continuous visual field image avoiding influence of aberration to be photographed. SOLUTION: In order to acquire an electron beam image of the whole of a predetermined region of a sample, a region small in aberration is identified in a visual field of a photographing device, and the whole region is photographed as a plurality of continuous visual field images while moving a sample stage by using the region as a unit. COPYRIGHT: (C)2009,JPO&INPIT