发明名称 |
LASERBEARBEITUNGSVERFAHREN UND LASERBEARBEITUNGSVORRICHTUNG UNTER VERWENDUNG VON ULTRAKURZPULSLASERN |
摘要 |
<p>A laser processing apparatus includes a laser generation apparatus for outputting an ultra-short pulse laser beam, a laser control apparatus for controlling the laser generation apparatus, an optical system, an optical system control apparatus for measuring the optical system, and a measurement apparatus for measuring the ultra-short pulse laser beam. The intensity of the largest noise component pulse in the ultra-short pulse laser beam is controlled to be 2.5% or less of the intensity of the primary pulse in the ultra-short pulse laser beam.</p> |
申请公布号 |
DE60323988(D1) |
申请公布日期 |
2008.11.20 |
申请号 |
DE2003623988 |
申请日期 |
2003.07.14 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD. |
发明人 |
MIZUYAMA, YOSUKE;TOYOFUKU, YOSUKE;LIU, XINBING;CHENG |
分类号 |
B23K26/00;B23K26/06;B23K26/38;B41J2/16;H01S3/107 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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