摘要 |
PROBLEM TO BE SOLVED: To provide a liquid crystal display device which has high insulation between a pixel electrode and a common electrode. SOLUTION: A method includes: forming an insulation film 13 composed of SiO<SB>2</SB>film or SiN film according to a sputtering method on the common electrode 12; and forming the patterned pixel electrode 14 on the insulation film 13, whereby liquid crystal 8 is arranged on the pixel electrode 14 and the alignment of the liquid crystal 8 is changed by parallel electric field formed in the liquid crystal 8 to display letters and images. In the insulation film according to a CVD method, the pixel electrode 14 and common electrode 12 are short-circuited, while in the insulation film according to the sputtering method, hydrogen does not generate and the insulation film can be formed while keeping the substrate at a temperature less than 100°C, and hence metal does not diffuse and the short circuit does not occur. COPYRIGHT: (C)2009,JPO&INPIT
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