| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of reducing a backflow of gas molecules and improving a discharge function. SOLUTION: A plurality of stages of stationary blades 11 are arranged to surround an outer peripheral face of a rotor 20 having a plurality of stages of rotary blades 21 formed thereon. Each of the stationary blades 11 is held at a predetermined interval by a spacer 13 and is alternately disposed with respect to the rotary blades 21 in the direction of a rotational axis. By providing a means having a labyrinth effect between an outer peripheral side end face of the rotary blades 21 and an inner peripheral face of the spacer 13 opposing thereto, the backflow of the gas molecules is reduced, and the discharge function is improved. COPYRIGHT: (C)2009,JPO&INPIT
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