| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a CVD apparatus having improved productivity by suppressing deterioration in a catalyst body, and to provide a semiconductor device and a photoelectric converter manufactured by the CVD apparatus. <P>SOLUTION: A shower plate 24 divides a space S in a chamber body 21 into two to form a first chamber S1 forming a film and a second chamber S2 excluding the first chamber S1. A connection terminal holder 31 arranges respective connection terminals 32 in the second chamber S2 each, and guides both the ends of the catalyst body W up to the second chamber S2 each. A first regulation valve Vc1 regulates pressure in the first chamber S1 to first target pressure, and a second regulation valve Vc2 regulates the pressure in the second chamber S2, to a second target pressure lower than the first value. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
