| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emitting element equipped with an electron emitting film hardly causing a change in characteristics by heat and capable of stable electron emission, an electron source, an image display device, and manufacturing methods thereof. <P>SOLUTION: The electron emitting film of this electron emitting element is a film having a first layer made of a first material, and a plurality of particles made of a second material having electrical resistivity smaller than that of the first material and provided in the first layer. The first material contains oxygen and nitrogen. In details, the first material is oxynitride, oxide doped with nitrogen, or nitride doped with oxygen. The particle diameter of the particle is 1-10 nm. The surface of the electron emitting film is terminated by hydrogen. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
