NITRIDE SINGLE CRYSTAL MANUFACTURING APPARATUS

摘要

The apparatus has a crucible for storing a solution; an inner container 16 for storing a crucible; a heating container 31 for storing the inner container 16 , the heating container 31 including heating elements 14 , a container body 13 provided with the heating elements 14 and a lid 12 combined with the container body 13 ; and a pressure vessel 30 for storing the heating container 31 and for charging an atmosphere comprising at least nitrogen gas. The lid 12 has a fitting surface 12 b to the container body inclined to a horizontal plane P.