发明名称 |
Hydrogen gas detecting membrane |
摘要 |
An optical hydrogen gas detecting membrane is prepared by sequentially depositing a platinum oxide layer and a catalytic metal layer on a transparent substrate, such as quartz glass, by vapor deposition such as the sputtering method. Palladium or platinum is used as the catalytic metal layer.
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申请公布号 |
US2008283388(A1) |
申请公布日期 |
2008.11.20 |
申请号 |
US20080153144 |
申请日期 |
2008.05.14 |
申请人 |
JAPAN ATOMIC ENERGY AGENCY |
发明人 |
YAMAMOTO SHUNYA;TAKANO KATSUYOSHI;INOUYE AICHI;YOSHIKAWA MASAHITO |
分类号 |
C23C14/00 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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