A HALF TONE MASK HAVING MULTI-HALF PERMEATION PART AND A METHOD OF MANUFACTURING THE SAME
摘要
Disclosed are a half tone mask having a multi semi-transmission part and a manufacturing method thereof that can pattern a plurality of layers using one mask, by having at least two or more semi-transmission parts with light transmission that are different from each other. The half tone mask having a multi semi-transmission part comprises a transparent substrate, a light transmission part formed the transparent substrate to transmit irradiation light of a predetermined wavelength band, a light shielding part formed the transparent substrate to shield the irradiation light of the predetermined wavelength band, and at least two or more semi-transmission parts formed by depositing semi-transmission material on the transparent substrate to pass through the irradiation light of the predetermined wavelength band with each different light transmission.
申请公布号
WO2008140136(A1)
申请公布日期
2008.11.20
申请号
WO2007KR02341
申请日期
2007.05.11
申请人
LG MICRON LTD.;KANG, KAP-SEOK;PARK, JAE-WOO;PARK, SANG-UK;SIM, YU-KYUNG;LEE, KEUN-SIK