Device for carrying out an electron beam process comprises a separating element which is fixed within a working chamber using detachable fixing elements

摘要

Device for carrying out an electron beam process comprises a separating element (10) which is fixed within a working chamber (2) using detachable fixing elements (11). The working chamber has a first region (12) directly arranged on an axial radiator and a second region (13) with a substrate holder (8). A separating element section, on which the electron beam (4) hits, is formed as an electrons outlet window (16).