A multi-wire electron discharge machine includes a first wire electrode for creating an electrical discharge between the first electrode wire and a semiconductor ingot, a second wire electrode for creating an electrical discharge between the second electrode wire and the semiconductor ingot, and a wire guide for maintaining the first wire electrode in a spaced apart and generally parallel orientation with respect to the second wire electrode across a semiconductor ingot slicing area.
申请公布号
WO2008092135(A3)
申请公布日期
2008.11.20
申请号
WO2008US52133
申请日期
2008.01.25
申请人
UNIVERSITY OF UTAH RESEARCH FOUNDATION;BAMBERG, EBERHARD;RAKWAL, DINESH, R.