DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE
摘要
<p>Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.</p>
申请公布号
WO2008140668(A1)
申请公布日期
2008.11.20
申请号
WO2008US05267
申请日期
2008.04.24
申请人
INNOVATIVE MICRO TECHNOLOGY;FOSTER, JOHN, S.;TURNER, KIMBERLY, L.