发明名称 SYSTEM AND METHOD FOR CONTROLLED MIXING OF FLUIDS AND MULTIPLEXING SETPOINTS
摘要 Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.
申请公布号 EP1991347(A2) 申请公布日期 2008.11.19
申请号 EP20070752100 申请日期 2007.02.28
申请人 ENTEGRIS, INC. 发明人 NIERMEYER, J., KARL;MCLOUGHLIN, ROBERT, F.;SMITH, JOSEPH, E.
分类号 B01F15/04;G05B11/01;G05D11/16;H04B7/212 主分类号 B01F15/04
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