发明名称 |
SYSTEM AND METHOD FOR CONTROLLED MIXING OF FLUIDS AND MULTIPLEXING SETPOINTS |
摘要 |
Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature. |
申请公布号 |
EP1991347(A2) |
申请公布日期 |
2008.11.19 |
申请号 |
EP20070752100 |
申请日期 |
2007.02.28 |
申请人 |
ENTEGRIS, INC. |
发明人 |
NIERMEYER, J., KARL;MCLOUGHLIN, ROBERT, F.;SMITH, JOSEPH, E. |
分类号 |
B01F15/04;G05B11/01;G05D11/16;H04B7/212 |
主分类号 |
B01F15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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