发明名称 |
Optical sensor with tilt error correction |
摘要 |
<p>In a optical sensor (30) for measuring object surfaces (2) with high precision, measuring errors due to tilt of an object surface can be corrected by using a pupil monitor (72), which senses the intensity distribution of the reflected measuring beam (b') in combination with a correction/ calibration table (76) and use the monitor signal to correct the primary measuring signal (FES) of the sensor. Especially for a differential confocal sensor, a further order of correction can be obtained by determining optimum position and diameter of the pinholes.</p> |
申请公布号 |
EP1992905(A1) |
申请公布日期 |
2008.11.19 |
申请号 |
EP20070108395 |
申请日期 |
2007.05.16 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO;WIMOPTIK B.V.;AC OPTOMECHANIX |
发明人 |
VAN AMSTEL, WILLEM DIRK;CACACE, LEONARD ANTONINO;HENSELMANS, RENS |
分类号 |
G01B11/02;G01B11/24;G01B11/30;G02B21/00 |
主分类号 |
G01B11/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|