CANTILEVER STRUCTURE CONSIDERING BY ELASTIC ENERGY

摘要

A cantilever structure interpretation method considering elastic energy is provided to measure more accurate transverse displacement and design a cantilever of more excellent performance. A Tb-Fe thin film(3) with positive magnetostriction and a Sm-Fe thin film(5) with negative magnetostriction are deposited on the upper and lower sides of a Polymide substrate(4) respectively. A rotating magnetic field is applied to the cantilever and the transverse displacement of the cantilever is measured. Therefore, the characteristic of the cantilever can be simply obtained.