发明名称 Semiconductor devices and methods for manufacturing the same
摘要 Semiconductor devices and methods for manufacturing the same are disclosed. An example method includes loading a first substrate to be provided with an oxynitride layer along with a second substrate having a nitride layer in a boat, and forming the oxynitride layer on the first substrate by placing the boat into a furnace and thermally treating the boat under an oxygen atmosphere.
申请公布号 US7452830(B2) 申请公布日期 2008.11.18
申请号 US20050191182 申请日期 2005.07.27
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 SHIN CHUL-HO;KIM TAE-HONG
分类号 H01L21/318;H01L29/94;H01L21/31;H01L21/324;H01L21/336 主分类号 H01L21/318
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