| 摘要 |
An object of the present invention is to provide an atomic force microscope (AFM) probe (100) for use in an AFM, and more particularly, an AFM probe (100) suitable for testing the topography and mechanical properties of a microstructure having a size of the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable hollow frame (110) having a fixed end and a movable end on one axis (Z); an AFM tip (120) supported by the movable end to be movable against a test sample (6) in a direction of the axis (Z); and a stopper (140) provided on an inner surface of the hollow frame (110) to control a movement of the AFM tip (120) within a predetermined range. |
