发明名称 |
Bushing unit with integrated conductor in ion accelerating device and related method |
摘要 |
An ion accelerating device includes a series of bushing units and a series of resistor circuit units. Each resistor circuit unit is coupled to one bushing unit. A bushing unit includes three integrated conductors to establish connections to the coupled resistor circuit unit and to an immediately adjacent bushing unit such that a voltage to the bushing unit may be degraded by the resistor circuit unit before reaching the lens and that two bushing units may contact one another directly.
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申请公布号 |
US7453069(B2) |
申请公布日期 |
2008.11.18 |
申请号 |
US20060567400 |
申请日期 |
2006.12.06 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
BUONODONO JAMES P.;BELL EDWARD W.;LUBICKI PIOTR |
分类号 |
H01J37/317 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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