发明名称 Bushing unit with integrated conductor in ion accelerating device and related method
摘要 An ion accelerating device includes a series of bushing units and a series of resistor circuit units. Each resistor circuit unit is coupled to one bushing unit. A bushing unit includes three integrated conductors to establish connections to the coupled resistor circuit unit and to an immediately adjacent bushing unit such that a voltage to the bushing unit may be degraded by the resistor circuit unit before reaching the lens and that two bushing units may contact one another directly.
申请公布号 US7453069(B2) 申请公布日期 2008.11.18
申请号 US20060567400 申请日期 2006.12.06
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 BUONODONO JAMES P.;BELL EDWARD W.;LUBICKI PIOTR
分类号 H01J37/317 主分类号 H01J37/317
代理机构 代理人
主权项
地址