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发明名称
稳定矽化金属膜及其制造方法
摘要
一种具有高热稳定性之金属矽化物以及一种于半导体处理中利用金属矽化物的方法。此金属矽化物较佳为将镍与具有约等于或大于2原子百分比之可置换型碳之置换型碳掺杂单晶矽化物反应而形成之镍矽化物。出乎意料地,此金属矽化物在约900℃或更高之温度下非常稳定,并且其薄膜电阻实质上不会因暴露于高温而受到影响。此金属矽化物与后续包括BPSG回流退火之高温处理步骤相容。
申请公布号
TW200845157
申请公布日期
2008.11.16
申请号
TW097108686
申请日期
2008.03.12
申请人
ASM美国股份有限公司
发明人
马高特森 弗拉基米尔;葛蓝尼门 恩斯特H A
分类号
H01L21/28(2006.01);H01L29/45(2006.01)
主分类号
H01L21/28(2006.01)
代理机构
代理人
詹铭文;萧锡清
主权项
地址
美国
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