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发明名称
半导体装置及其制造方法与光罩布局方法
摘要
一种光罩的布局方法,一种半导体装置以及一种应用这种光罩的布局方法对光罩进行设置的半导体装置之制造方法。此半导体装置可包含:微透镜主型样,系位于基板上;以及微透镜假镀型样,系位于微透镜主型样一侧。应用透过这种光罩的布局方法所设置之光罩,可以大量地形成微透镜假型样。本发明一实施例之光罩的布局方法可透过形成基本假镀型样,并从此基本假镀型样中移除边缘区域,进而对微透镜假镀型样进行设置。此微透镜假镀型样可被设置为大致的圆形。在本发明一实施例中这种大致的圆形系为八角形。
申请公布号
TW200845374
申请公布日期
2008.11.16
申请号
TW097117298
申请日期
2008.05.09
申请人
东部高科股份有限公司
发明人
李相熙;曹甲焕
分类号
H01L27/146(2006.01);H01L21/027(2006.01)
主分类号
H01L27/146(2006.01)
代理机构
代理人
许世正
主权项
地址
南韩
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