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发明名称
具有垂直存取装置之记忆体
摘要
本发明揭示一种具有垂直存取装置之半导体记忆体装置。在一些具体实施例中,形成该装置之一方法包括在一半导体基板中提供一凹陷,该凹陷包括一对相对侧壁以及在该等相对侧壁之间延伸的一底层。可在该凹陷之该等侧壁与该底层之上沈积一介电层。可在该介电层上形成一导电膜并对其进行处理以自该凹陷之该底层选择性移除该膜,并自该等相对侧壁移除该导电膜之至少一部分。
申请公布号
TW200845308
申请公布日期
2008.11.16
申请号
TW097102374
申请日期
2008.01.22
申请人
美光科技公司
发明人
华纳 钟琳
分类号
H01L21/8242(2006.01);H01L21/336(2006.01);H01L27/108(2006.01)
主分类号
H01L21/8242(2006.01)
代理机构
代理人
陈长文
主权项
地址
美国
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