METHODE UND APPARAT ZUR VERBESSERUNG DER EIGENSCHAFTEN EINES NIEDRIG-K SI-O-C FILMES,申请号AT19990402076T-传众专利搜索

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发明名称	METHODE UND APPARAT ZUR VERBESSERUNG DER EIGENSCHAFTEN EINES NIEDRIG-K SI-O-C FILMES
摘要
申请公布号	AT414326(T)	申请公布日期	2008.11.15
申请号	AT19990402076T	申请日期	1999.08.17
申请人	APPLIED MATERIALS, INC.	发明人	XIA, LI-QUN;LIM, TIAN-HOE;GAILLARD, FREDERIC;YIEH, ELLIE
分类号	H01L21/316;C23C16/02;C23C16/30;C23C16/40;C23C16/56;H01L21/314	主分类号	H01L21/316
代理机构		代理人
主权项
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