MANUFACTURING METHOD OF CRYSTALLINE SILICON SOLAR CELL AND MANUFACTURING APPARATUS AND SYSTEM FOR THE SAME

摘要

In manufacturing the crystalline silicon solar cell, the footprint of the production of solar battery system is reduced by performing the texturing process and ion doping process in the same chamber or arranging consecutively each chamber corresponding to each process. The manufacturing method of the crystalline silicon solar cell is provided. The first step is for preparing the crystalline silicon substrate. The second step is for performing the texturing by using the plasma to form the concavo-convex for enhancing the optical absorption rate on the surface of substrate(ST120). The third step is for performing the plasma ion doping in order to form the PN junction on the substrate(ST130). The fourth step is for heating the substrate in order to activate the doped ion in the third step(ST140). The fifth step is for forming the reflection barrier layer on the top of the doped layer formed by the plasma ion doping(ST150). The sixth step is for forming a front electrode and rear electrode on the front and rear surface of substrate(ST160).