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发明名称
VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS MIT BANDENTWORFENEM SUPERGITTER
摘要
申请公布号
DE602004016855(D1)
申请公布日期
2008.11.13
申请号
DE200460016855T
申请日期
2004.06.28
申请人
MEARS TECHNOLOGIES INC.
发明人
MEARS, ROBERT J.;YIPTONG, JEAN AUGUSTIN;HYTHA, MAREK;KREPS, SCOTT A.;DUKOVSKI, ILIJA
分类号
H01L29/15;H01L21/8238;H01L29/10;H01L29/78
主分类号
H01L29/15
代理机构
代理人
主权项
地址
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