| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a user-friendly exposure system. <P>SOLUTION: A substrate clamping mechanism of the exposure system is composed of four clamping bars 41A to 41D and a moving unit that operates each clamp bar 41A to 41D to open and close as well as to slide and move in X or Y direction. The side part of each clamping bar 41A, 41C is provided with a positioning face 44a where the rim of the substrate 13 is to be butted. In a manual mode of manually mounting a substrate 13 on a stage 14, clamping bars 41A, 41C act as positioning bars. <P>COPYRIGHT: (C)2009,JPO&INPIT |
