| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide supply of process liquid at constant pressure or constant flow rate while keeping secondary pressure of secondary flow rate of a constant pressure valve constant without increasing delivery pressure of a pump higher than necessary one. <P>SOLUTION: In a process liquid supply system provided with: a process liquid tank 3 storing process liquid; a bellows pump 4 continuously delivering process liquid from the process liquid tank 3 to piping 2 connecting to a process liquid supply nozzle 36 supplying process liquid; and the constant pressure valve 5 positioned on a secondary side of the bellows pump 4 and inhibiting pulsation of liquid flow by the bellows pump 4, a gas supply source 7 supplying gas compensating pressure drop of pulsation of liquid flow by the bellows pump 4 is connected to the secondary side of the bellows pump 4 in the piping 2, and a filter 8 including a gas release part 8a discharging gas supplied in the piping 2 from the gas supply source 7 is provided. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
