| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel method for acquiring an image of a surface of a minute sample from height information of respective surface parts. SOLUTION: The height information representing heights of respective surface parts of the sample, which is acquired by a three-dimensional profiler, is stored in an image memory section 201. An image to quasi-brightness image converting section 207 computes tilt information representing tilts of respective surface parts from the height information representing the heights of respective surface parts of the sample, creates brightness information of the image such that the tilts of the surface parts correspond to brightness values of the surface parts in the image of the sample surface, and forms a brightness image of the sample surface by using the brightness information. COPYRIGHT: (C)2009,JPO&INPIT
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