| 摘要 |
PROBLEM TO BE SOLVED: To provide an aging device capable of reducing the temperature change of a self-heating sample following the temperature change of the sample. SOLUTION: The aging device for cooling the sample 1 to regulate temperature by bringing a water-cooled plate 25 heat-exchanged with a refrigerant supplied by a refrigerant feeder, into contact with the self-heating sample 1, is provided with a temperature sensor 31 detecting the temperature of the sample 1, a temperature measuring circuit 32, an arithmetic circuit 33 regulating the flow of the refrigerant supplied by the refrigerant feeder based on the temperature detected result of the sample 1, a controller 34, and a proportional flow regulating valve 26. COPYRIGHT: (C)2009,JPO&INPIT
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