| 摘要 |
PROBLEM TO BE SOLVED: To provide a monitor and a control system using mid-infrared spectroscopy for vapor hydrogen peroxide processing techniques. SOLUTION: The hydrogen peroxide vapor system includes a light source 30 for supplying light having at least a component in a mid-infrared region; means 32 and 34 for individually detecting light in the mid-infrared region in (a) a first narrow spectrum absorbed by the hydrogen peroxide vapor, (b) a second narrow spectrum absorbed by the carrier vapor, and (c) a third spectrum absorbed by neither the hydrogen peroxide vapor nor the carrier vapor; and means 40 and 42 for determining concentration of at least the hydrogen peroxide vapor from the detected light of the mid-infrared region. COPYRIGHT: (C)2009,JPO&INPIT |
