| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for fabricating a probe for a scanning probe microscope (SPM), particularly a method for fabricating the probe using (111) single crystal silicon. SOLUTION: The method for fabricating a probe tip for use in the scanning probe microscope includes steps of forming a triangular prism formed with protective films on both sidewalls by patterning a (111) general silicon wafer; etching the silicon wafer to make the triangular prism into a probe tip of triangular pyramid shape; and removing the protective films. COPYRIGHT: (C)2009,JPO&INPIT |
