| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is capable of absorbing a glass substrate stably with a low applied voltage. SOLUTION: The electrostatic chuck is constituted so that mutually intricate electrodes make a pair and are embedded in a ceramic material, wherein the volume resistivity of the ceramic material is from 1×10<SP>8</SP>to 1×10<SP>14</SP>Ωcm, and the thickness of the absorption plane side of the ceramic material covering the electrode is from 100 to 200μm, and the width of the pattern of the electrode is from 0.5 to 1 mm, and the distance of the adjacent pattern of the electrode making the pair is from 0.5 to 1 mm, and the object of the absorption is the glass substrate. COPYRIGHT: (C)2009,JPO&INPIT |
