DIAPHRAGM STRUCTURE FOR MICRO-ELECTROACOUSTIC DEVICE

摘要

A diaphragm structure ( 10 ) includes an oscillating diaphragm ( 11 ) and a strengthening member ( 13 ) superposed on and surrounding a periphery of the oscillating diaphragm. The strengthening member is hot-pressed on the periphery of the oscillating diaphragm. The strengthening member has a higher melting temperature than that of the oscillating diaphragm, and the strengthening member and the oscillating diaphragm are cooled after they are heat-pressed in a mold to thereby obtain residual stress in the oscillating diaphragm.