| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an image sensor including a microlens formed of an inorganic substance. SOLUTION: This manufacturing method for the image sensor includes a step for forming a metal wiring layer on a semiconductor substrate 10 including unit pixels, a step for forming a color filter 40 on the metal wiring layer, a step for forming a seed microlens 61 on the color filter 40, a step for cleansing the surface of the seed microlens 61, and a step for vapor-depositing an inorganic thin film 80 on the seed microlens 61 to form a gapless microlens 100. COPYRIGHT: (C)2009,JPO&INPIT
|
