摘要 |
PROBLEM TO BE SOLVED: To provide an electro-optical device enhancing display performance thereof by preventing particles from being generated in a manufacturing process, and to provide a manufacturing method thereof and electronic equipment. SOLUTION: An organic EL device 10 has a TFT element 4 provided on an element substrate 23 and a pixel electrode 26 provided on an organic insulating layer 25 covering the TF element 4 electrically connected through a contact hole formed in the organic insulating layer 25. A metal oxide film 24 having conductivity is provided in at least a region where the contact hole is opened, on a drain electrode 4b of the TFT element 4. COPYRIGHT: (C)2009,JPO&INPIT
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