| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress glow discharge in the space between a work coil and a shield case. <P>SOLUTION: In a heating mechanism utilizing high frequency induction heating action used in a reduced pressure environment, this high frequency induction heating device has the work coil to heat a part to be heated by receiving supply of high frequency power and sending an induction current to the part by high frequency induction, and a shield case to surround the surroundings except for a space between a dielectric base for holding the work coil and the part to be heated and to shield an electric field by the work coil, and is provided with a field shielding antenna having an earth potential between the dielectric base and the shield case. Thereby, a potential difference between the surface of the dielectric base and the shield case is reduced, and generation of glow discharge between the dielectric base and the shield case is suppressed by the reduction of this potential difference. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
