| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which a ceramic dielectric part related to electrostatic attraction force has a thiner and denser film than the conventional types, and which has superior characteristics such as denseness, thermal conduction, abrasion resistance, corrosion resistance and contamination. SOLUTION: Brittle material microparticles having a preliminary internal strain are sprayed at a high speed on a substrate surface. Then, the brittle material microparticles are deformed or crushed due to collisions on the substrate. The deformation or crush develops active nascent surfaces, through which crystallites are recombined firmly. COPYRIGHT: (C)2009,JPO&INPIT |
