| 摘要 |
PROBLEM TO BE SOLVED: To provide a probing apparatus that is capable of reducing the time period (maximum of five hours) when the production test is unable to be carried out by using adaptation of the probing apparatus, and to provide an operation method for such a probing apparatus. SOLUTION: An operation method for the probing apparatus has a step to control the temperature of the probing apparatus at least partially. Another operation method for the probing apparatus has a step for generating and transferring the thermal energy between a heat-exchange means and at least one member on the probing apparatus, wherein a generation step, a transfer step, and a generation and transfer step for the thermal energy are controlled. The probing apparatus includes, at least one heat-exchange element 24, which is arranged in a spatial relation relative to at least one probe fixture support 22 and affect the temperature of the probe fixture support. COPYRIGHT: (C)2009,JPO&INPIT
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