| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor whose working pressure range is expanded and service life is long. SOLUTION: The pressure sensor 10 has a diaphragm 12, having pressure reception sections 14 (a first pressure reception section 14a and a second pressure reception section 14b) for receiving pressure to be measured and a support section 18 provided around the pressure reception sections 14. The support section 18 has a deflection suppression section 22 arranged between the two pressure reception sections 14a, 14b. A pressure sensitive element 30 is arranged on one surface of the diaphragm 12. More specifically, one end and the other end of the pressure sensitive element 30 stick to the first pressure reception section 14a and the second pressure reception section 14b, respectively, while striding over the deflection suppression section 22. A part where the pressure sensitive section 14 and the pressure sensitive element 30 are joined is closer to the side of the deflection suppression section 22 from the center of the pressure reception section 14. COPYRIGHT: (C)2009,JPO&INPIT
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