发明名称 |
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME |
摘要 |
In a method of manufacturing an electrostatic chuck, the method includes: a step of providing an electrostatic chucking portion including an electrode to which a voltage is applied and a film-like insulating layer covering the electrode; a step of bonding an elastomer layer onto the electrostatic chucking portion; a step of bonding a metal base onto the elastomer layer such that recess portions formed on a surface of the metal base face the elastomer layer.
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申请公布号 |
US2008278883(A1) |
申请公布日期 |
2008.11.13 |
申请号 |
US20080116631 |
申请日期 |
2008.05.07 |
申请人 |
SHINKO ELECTRIC INDUSTRIES CO., LTD. |
发明人 |
SHIRAIWA NORIO;KOBAYASHI TAKESHI;HATA YUICHI;WATANABE NAOTO |
分类号 |
H01T23/00;B32B37/10 |
主分类号 |
H01T23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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