发明名称 |
Systems and Methods for a Thin Film Capacitor Having a Composite High-K Thin Film Stack |
摘要 |
Systems and methods are provided for fabricating a thin film capacitor involving depositing an electrode layer of conductive material on top of a substrate material, depositing a first layer of ferroelectric material on top of the substrate material using a metal organic deposition or chemical solution deposition process, depositing a second layer of ferroelectric material on top of the first layer using a high temperature sputter process and depositing a metal interconnect layer to provide electric connections to layers of the capacitor.
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申请公布号 |
US2008278887(A1) |
申请公布日期 |
2008.11.13 |
申请号 |
US20080117099 |
申请日期 |
2008.05.08 |
申请人 |
ZELNER MARINA;CAPANU MIRCEA;NAGY SUSAN C |
发明人 |
ZELNER MARINA;CAPANU MIRCEA;NAGY SUSAN C. |
分类号 |
H01G4/06;H01G9/00 |
主分类号 |
H01G4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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