STAGE FOR SUBSTRATE TEMPERATURE CONTROL UNIT

摘要

A stage for substrate temperature control unit that realizes low cost and good response by preventing any thermal deformation of plate while using a non-ceramic material as a plate material. The stage for substrate temperature control unit is a stage for use to mount a substrate in a substrate temperature control unit capable of controlling the temperature of the substrate, characterized in that the stage includes a plate having a first surface opposed to the substrate and a second surface on opposite side of the first surface and a sheet heater bonded to the second surface of the plate, and that the first surface of the plate is provided with a surface treatment of first thickness while the second surface of the plate in a given area is either provided with a surface treatment of second thickness smaller than the first thickness or not provided with any surface treatment at all.