| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle film that is thinned in thickness of the film and high in strength. <P>SOLUTION: A method of manufacturing a pellicle includes: forming the pellicle film consisting of a fluororesin; peeling off the pellicle film from a substrate forming the pellicle film; and heating the pellicle film. The heating temperature is preferably lower than the temperature of a glass transition point of the pellicle film. In the pellicle, the pellicle film has a tensile strength of not less than about 38.25 MPa (390 kgf/cm<SP>2</SP>). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
