| 摘要 |
PROBLEM TO BE SOLVED: To provide an embedding depth measuring method for a metal film for nondestructively, accurately and easily measuring the depth down to the metal film embedded in a translucent material from the surface of the translucent material. SOLUTION: A reflection spectrum of the translucent material with the metal film embedded is measured at a fixed incident angleθusing infrared light to obtain the reflection spectrum, and a period P(cm<SP>-1</SP>) of periodic interference fringe in a wave number region of 2500 cm<SP>-1</SP>or more of the obtained reflection spectrum is obtained. A refraction index of the translucent material is made n, and depth d(cm) to the metal film from the surface of the translucent material is obtained by d=1/(2P(n<SP>2</SP>-sin<SP>2</SP>θ)<SP>0.5</SP>). COPYRIGHT: (C)2009,JPO&INPIT
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