| 发明名称 |
Self assembly microstructure e.g. micro rotary fan, has movable portion that includes photosensitive polyimide elastic joint so that movable portion is rotated and lifted up by large surface tension force is generated from joint |
| 摘要 |
<p>A microstructure layer comprises stationary portion (50) and movable portion (51). The movable portion has elastic joint (52) made of photosensitive polyimide thin film so that movable portion is rotated and lifted up by large surface tension force is generated from joint after high temperature reflow process.</p> |
| 申请公布号 |
DE102007020792(A1) |
申请公布日期 |
2008.11.13 |
| 申请号 |
DE20071020792 |
申请日期 |
2007.05.03 |
| 申请人 |
SUNONWEALTH ELECTRIC MACHINE INDUSTRY CO. LTD. |
发明人 |
HORNG, ALEX;WANG, CHIH-HUNG;HUANG, I-YU |
| 分类号 |
B81B5/00;B81B7/02;B81C1/00;H02N1/00 |
主分类号 |
B81B5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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