发明名称 |
MASS PULSE SENSOR AND PROCESS-GAS SYSTEM AND MEHTHOD |
摘要 |
An improved valve device, a valved process-gas apparatus, and a method for confirming operations in a gas-process system are disclosed. The valve device includes an electronically controlled valve designed to cycle between closed and open conditions, with closed-to-open and open-to-closed response times less than about 250 ms, to control the flow of a gas through the valve. A sensor disposed at the downstream side of the valve is operable to (i) detect the presence of at least a threshold amount of gas during the period of the valve's closed-to-open response, and (ii) to detect the absence of at least a threshold amount of gas after the period of the valve's open-to-closed response, thus confirming successful operation of the valve.
|
申请公布号 |
WO2007109346(A3) |
申请公布日期 |
2008.11.13 |
申请号 |
WO2007US07081 |
申请日期 |
2007.03.21 |
申请人 |
ULTRA CLEAN HOLDINGS, INCORPORATED;KRISHNAN, SOWMYA;SALEEM, MOHAMED |
发明人 |
KRISHNAN, SOWMYA;SALEEM, MOHAMED |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|