MICRO-MIRROR ELEMENT

摘要

A micromirror element giving diversity to the design form of a torsion bar and manufacturing method thereof is provided to give diversity of design by accurately completing a desired dimension. A micromirror element giving diversity to the design form of a torsion bar and manufacturing method thereof comprises the following steps: a step for forming a first mask pattern(10) to form a frame(113) and a mirror forming part(111) on a substrate(110'); a step for forming a second mask pattern(20) to form a bridging part(112) on the substrate; a step for performing a first etching processing about the substrate using the first and the second mask pattern; a step for selectively removing a second etching mask; a step for performing a second etching processing about the substrate using the first mask pattern; and a step for removing the first mask pattern.