发明名称 THIN FILM FORMING METHOD AND THIN FILM FORMING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a thin film forming method capable of easily forming a thin film thinner than the conventional one without forming it on a substrate, and a thin film forming apparatus. SOLUTION: The thin film forming apparatus 10 is equipped with a cylindrical superconductive magnet 11 consisting of a superconductive coil, a cryostat 12 in which the superconductive magnet 11 is stored, a gradient magnetic field generator (not illustrated) for generating a gradient magnet field in a magnetic field generated by the superconductive magnet 11, and an annular member 13 formed by a wire member. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008273016(A) 申请公布日期 2008.11.13
申请号 JP20070118749 申请日期 2007.04.27
申请人 HIROSHIMA UNIV;SHINSHU UNIV 发明人 TANIMOTO TAKAFUMI;SUEDA MANABU;KATSUKI AKIO
分类号 B29C67/00;B29C41/14;B29C41/50 主分类号 B29C67/00
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