发明名称 |
COATING FILM FORMING APPARATUS, USE OF COATING FILM FORMING APPARATUS, AND RECORDING MEDIUM |
摘要 |
A coating film forming apparatus that holds a substrate upon a spin chuck and forms a coating film by supplying a chemical liquid upon a top surface of said substrate comprises: an outer cup provided detachably to surround the spin chuck; an inner cup provided detachably to surround a region underneath the substrate held upon the chuck; a cleaning nozzle configured to supply a cleaning liquid for cleaning a peripheral edge part of the substrate, such that the cleaning liquid is supplied to a peripheral part of a bottom surface of the substrate; a cutout part for nozzle mounting, the cutout part being provided to the inner cup to engage with the cleaning nozzle; and a cleaning liquid supply tube connected to the cleaning nozzle, the cleaning nozzle being detachable to the cutout part in a state in which the cleaning liquid supply tube is connected.
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申请公布号 |
US2008280054(A1) |
申请公布日期 |
2008.11.13 |
申请号 |
US20080106747 |
申请日期 |
2008.04.21 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
OGATA NOBUHIRO;INADA HIROICHI;YAMAMOTO TARO;FUJIMOTO AKIHIRO |
分类号 |
B05D1/40;B05B13/02;B05B15/04;B08B3/04;B08B13/00 |
主分类号 |
B05D1/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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