METAL MEMBER, POSITION DETECTION DEVICE, DRIVE DEVICE, OBJECT DETECTION DEVICE, AND METHOD OF PROCESSING METAL MEMBER

摘要

An object detection device having a position control mechanism using a metal member whose position is detected by using reflection of light, wherein an influence of a flaw to position detection accuracy is minimized. A lens section (206) is provided at a movable member (205) supported by plate springs (202a, 202b), and the lens section (206) is moved in the direction of arrow A or B by drive means (218) using electromagnetic force. In the construction above, the surface of an area (204) to which inspection light for detecting the position of the plate spring (202b) is applied is made rough, causing the inspection light to be diffusely reflected. By doing so, even if the surface of the plate spring (202b) has a flaw, it does not affect the accuracy of detection of the position of the plate spring (202b).