| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element which can obtain piezoelectric strain by reversible non-180° domain rotation and which has a piezoelectric film having high piezoelectric performance. <P>SOLUTION: In a piezoelectric element 1, a piezoelectric film 14 comprises one ferroelectric phase from among a ferroelectric phase (I), where an angle θm formed by an electric field direction and a normal line of a face formed by the spontaneous polarization axis and a [010] axis satisfies -45°<θm<+45° and θm≠0°; a ferroelectric phase (II), where a spontaneous polarization axis is vertical to the electric field direction, and an angle θm formed by the electric field direction and a normal line of a face formed by the spontaneous polarization axis and the [010] axis satisfies -45°<θm<+45° and θm≠0°; and a ferroelectric phase (III), where the [010] axis is vertical to the electric field direction and an angle θm, formed by the electric field direction and the normal line of the face formed by the spontaneous polarization axis and the [010] axis satisfies -45°<θm<+45° and θm≠0°. <P>COPYRIGHT: (C)2009,JPO&INPIT |
